Covers 3 types of cleaning; US cleaning, wet cleaning and plasma cleaning and is available with this in-line system. This is fully automatic except for work supply/discharge.
Features
(Wiping chuck of the floating structure) supports multiple thickness and height of a glass panel.
Up to 3 sides can be wiped (Rectangular terminal sides). The spot cleaner removes dust before wiping with solvent. The atmospheric plasma removes organic matters on the surface of a glass.